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Flow Switches for Semi-Conductor Applications
Microflow Switch
- 1/4 VCR® connections
- 316L Stainless Steel
- Explosion Proof - Standard
- CE compliant
FS6800 Gas Series:
Adjustable flow ranges: 30 sccm to 20 slpm
Flow Switch - High Flow
- 1/4, 1/2 VCR® connections
- 316 Stainless Steel
- Explosion Proof - Optional
- CE compliant
FS5800 Gas Series:
Adjustable flow range: 1 slpm to 120 slpm